A Faceted Magnetron Concept Using Field Emission Cathodes
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چکیده
منابع مشابه
TUNING THE CRYSTALLOGRAPHIC STRUCTURE AND MORPHOLOGY OF NANOCRYSTALLINE CaB6 FILMS DEPOSITED BY DC MAGNETRON SPUTTERING OPTYMALIZACJA STRUKTURY KRYSTALOGRAFICZNEJ I MORFOLOGII NANOKRYSTALICZNYCH WARSTW CaB6 NANIESIONYCH METODĄ NAPYLANIA MAGNETRONOWEGO
Through changing the argon pressure, CaB6 films with different crystallographic orientation and morphology on glass substrates were prepared by direct current (DC) magnetron sputtering method. The film textures, crystallite sizes, composition and morphology were investigated by a spectrum of characterizing techniques in terms of X-ray diffraction (XRD), field emission scanning electron microsco...
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